PREPARATION AND CHARACTERIZATION OF MOS DEVICE USING MGO FILM AS A DIELECTRIC MATERIAL

Preparation and Characterization of MOS Device using MgO Film as A Dielectric Material

Preparation and Characterization of MOS Device using MgO Film as A Dielectric Material

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In the present work, fabrication and characterization of Al/MgO/Si MOSdevice has been carried out using PLD as a deposition technique, and forcomparison Al/SiO2/Si MOS device 27" Self Clean Wall Oven has been also constructed.The obtainedresult show that , The Electrical and photovoltaic characteristics of MOS device are strongly dependent on the oxide type and thickness, beside that, the Modesty Panels C-V measurement reveled that prepared device are of abrupt type.The Spectral Responsivity measurement of (Al/MgO/Si) MOS device is found to be 0.

27A/W while of (Al/SiO2/Si) MOS device is 0.20A/W and the Rise and Response time measurement of (Al/MgO/Si) MOS device was shorter than of (Al/SiO2/Si) MOS device.

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